Jing Hua Wu was arrested Saturday, a day after the shootings in Santa Clara, west of San Jose. A manhunt ended at an intersection in his home city of Mountain View, and he will be booked into jail on three counts of murder, said Santa Clara Police Lt. Mike Sellers.
Wu, who is married and has twin sons, was not armed when he was arrested, and officers did not find a gun in his vehicle, police said.
A phone message left by The Associated Press at a number listed for Wu's home address was not immediately returned.
Wu had worked at the Silicon Valley high-tech firm SiPort Inc. as a product test engineer until he was let go on Friday morning. Police said he returned sometime after 3 p.m. local time Friday.
"He requested a meeting with several company officials," said Santa Clara Police Chief Stephen Lodge. "It was during this meeting that Jing Wu took out a 9 mm handgun and shot and killed all three officials."
Killed were 56-year-old Sid Agrawal, SiPort's chief executive officer; Brian Pugh, 47, vice president of operations; and Marilyn Lewis, 67, head of human resources.
Wu had been missing since the shootings at the offices of the 4-year-old company, which develops digital radio semiconductors.
Detectives received a tip about Wu's whereabouts on Saturday and were waiting for him as he exited his silver sport utility vehicle near a shop.
"This is a truly tragic event. These people are innocent victims just trying to do their jobs," Sellers said. "To get him into custody within hours of the event was very, very important to our department."